Registered
PRESSURE SENSOR AND METHOD FOR FABRICATING THE SAME
- Inventors
-
Chang Han Je, Lee Sung Q, Chang Auck Choi, Yang Woo Seok
- Application No.
- 15/234911 (2016.08.11)
- Publication No.
- US 2017-0241853 A1 (2017.08.24)
- Registration No.
- 10113928 (2018.10.30)
- Country
- UNITED STATES
- Project Code
-
15ZB1500, Development of Environment & UserAdaptable MEMS Microphone Solution,
Yang Woo Seok
- KSP Keywords
- Pressure Sensor
- Family
-