ETRI-Knowledge Sharing Plaform

Acoustic Sensor Micro-Electro-Mechanical System(MEMS) Mems Microphone Open-Circuit Capacitive-Type Sensing Material Si Substrate Operating Temperature Gas Concentration Sacrificial Layer Frequency Response Characteristics Sensor Based Fabrication Process Scanning Electron Microscopy(S.E.M.) Temperature Coefficient Of Resistance(TCR) Piezoelectric Ceramics Zero-Bias Low Power Consumption High Sensitivity Pull-In Voltage Semiconductor-Type Sound Pressure Level Gas Response Acoustic Actuator Alloy Films Cmos-Compatible Si Film Smart Sensor Sensor Node Nano-Powders Back-Plate Structure-Based 1/F Noise Recovery Time Silicon Film Particle Size Laser Scanning Vibrometer Tin Oxide Micro Gas Sensor Response Time Displacement Characteristics Sound Quality Diffraction Analysis Infrared Focal Plane Array(IRFPA) Self-Powered Surface Micromachining Stress Reduction Solid Electrolyte Reference Material Sound Field Low Frequency Range Bias Voltage High Temperature Commercial Products Sensor Module Micro-Heater Sensing Electrode Creative Technology Green Building(GB) Air-Gap Measurement Condition Thick Films Parasitic Capacitance Active Area Surface Micromachined Mems Flow Type Residual Stress Measurement Range Ultra-Thin Amorphous Silicon Sensing Membrane Proposed Model Conventional Model X-Ray Diffractometer(XRD) Silicon Substrate Detection Limit Etching Process Natural Environments Chemical Reaction(Biomimetic) Infrared Detection Sensor Performance Single-Layer Crystal Structure Gas Measurement Solid State Blue-Green Algae Bridge Type Monitoring System Mems Sensor Stoney Equation Sno 2 Response And Recovery Isotropic Etching Lumped Parameters Piezoelectric Single Crystal Dry Etching Semiconductor Gas Sensor Extraction Method Inlet Type Analysis And Simulation Aluminum-Doped Zinc Oxide Prediction Technology High Energy Vibrational Frequency Equivalent Circuit Modeling Resonant Mode Thermal Uniformity Higher Frequency 2 Khz Vacuum Cavity Noise Characteristic Equivalent Circuit Modelling Gas Detection Membrane Displacement Co-Precipitation Method Complex Sensor Micromachined Sensor Chip Area Formaldehyde Gas Sensor Measurement Results Mixed Data Plate Anchor Bi-Layer Detection Techniques Metal Dopants Reactive Ion Etching Ultrafast Response Front-End Phase Change Material(PCM) Model-Based Nanoimprint Lithography(NIL) Sound Source Hyperspectral Image O 3 Screen-Printed Multifunctional Sensors Rare Metal Vibrational Displacement Capacitive Humidity Sensors Capacitance Model Mems Capacitive Microphone Lumped Model Complementary Metal-Oxide-Semiconductor(CMOS) Flat Frequency Response Water Quality Cmos Compatibility Wireless Sensor Network Applications Multi-Layer Physical Properties Dc Bias Piezoelectric Mems Space Time(ST) Real-Time Wireless Sensor Networks Wireless Power Transfer Systems(WPTS) Limited Power Ubiquitous Environment Reduction Algorithm Low Temperature Nano-Scale Indoor Environment High Performance High Detectivity 5 Nm Intrinsic Capacitance Silicon Nitride Growth Orientation Micro-Sensor Low Noise Measurement Time Lithium-Ion Batteries(LIBs) Artificial Intelligence Design Optimization Frequency Characteristics Gas Flow Rate 60 Hz VO 2 Intrusion Detection Technique Integrated Process Infrared (Ir) Sensor Signal-To-Noise Security Cases Transfer Frequency Al Electrode Bio-Signal Mems Accelerometers Measured Frequency Offset Voltage Novel Process Process Layer Infrared Sensors Signal Processing Ar Gas Acoustic Pressure Active Devices Current Collector Phase-Change Random Access Memory(PRAM) Parallel Connection Low Stress Sensor Bias Thermal Time Constant(TTC) Cobalt Oxides Natural Frequency Infrared Absorption Inlet Structure Sound Performance Buffered Hf Direct Etching Dynamic Responses Double Layer Etching Selectivity Environmental Monitoring Fabricated Surface Fire Detection System Monolayer Coating Personal Computer(PC) Large Signal Signal Noise Ratio(SNR) Surface Properties Vibration Characteristics Analytical Model Aqueous Solution Coplanar Configuration Crystalline Structure Wavelength Range Material Combination Room Temperature Lumped Spring-Mass Model Thermal Evaporation A-Si:H Cathode Materials Durability Improvement Piezoelectric Membrane Pressure Response Standard Cmos Process Surface Water Thermal Properties Screen Printing Technique Unique Solution Barrier Materials Device Applications Etching Mechanism Heat Spreading Polyvinylidene Difluoride(PVDF) Layer-By-Layer(LbL) Small-Signal Modeling Standard Deviation(STD) Selectively Etching Deep Rie Device Size Different Order Electrical Sensing Monolithic Integrated Plasma-Enhanced Atomic Layer Deposition Improved Sensitivity Interdigitated Electrode(IDE) Low Input Impedance Thermal Decomposition Capacitive Mems Accelerometer Metal Oxide Gas Sensor Parallel Plate Capacitor Ultrasonic Transmitter Adaptively Coupled Plasma Carbon Dioxide Contact Resistance(73.40.Cg) High-Power Piezoelectric Hydriodic Acid Current Consumption Measurement System Noise Equivalent Temperature Difference Nonlinear Response Post-Annealed Ion Bombardment Angle-Resolved X-Ray Photoelectron Spectroscopy(ARXPS) Bulk Micromachining Experimental Study Numerical Analysis Noise Factor Licoo 2 Surface Treatments Voltage Booster Natural Resonance Frequency Plasma-Enhanced Ald Low Resistivity Gas Sensing Behavior Rf Magnetron Sputtering Technique Lower Power Electromotive Force (Emf) Variation Rate Crystalline State Design And Fabrication 3.5 Ghz Oxygen Gas Relative Humidity(RH) Reference Current Chemical Vapour Deposition(CVD) Wet Process Personal Digital Assistant(PDA) Resistance Change Low Substrate Temperature Low-Cost Sick Building Syndrome(SBS) Atomic Force Microscope(AFM) Disturbance Environment Electro-Mechanical Coupling Coefficient As 2 Circular Diaphragm Frame Rate(FR) Gas Sensor Applications Mean Stress Optical Microscopy Post-Annealing Treatment It Depends Lattice Distortion Thermal Annealing Consumer Electronics Co2 Sensor Damping Ratio Energy Conversion Efficiency Gaussian White Noise NH 3 Relative Thickness Total Harmonic Distortion Sampling Frequency Vacuum Sealing Experiment And Simulation Wide Dynamic Range Micro Devices Specific Detectivity White Noise Signal Monitoring Applications Poly(Ethylene-Co-Vinyl Alcohol) Power Applications Temperature Range Activation Technique Membrane Deflection Normal Operation Hydrophilic Surface Compressive Stress Data Acquisition Board Sputtering Conditions Numerical Simulation(Trnsys16) Voltage Controlled Acoustic Performance Comparative Study Finite Element Analysis (Fea) Micromachining Technique Pvdf Film Low Sensitivity Highly Sensitive Tensile Stress Contact Angle(CA) Warm-Up Lithium Carbonate Low Thermal Conductivity Structural Parameters Volume Effects Piezoelectric Speaker Response Curves Readout Integrated Circuit Relative Displacement Indium Oxide Lithium Manganese Oxide Low Snr State Modeling Spring Constant Thin Film Stress Air Damping Monitoring Service Nitrogen Oxide(NO) Reference Electrode Security Monitoring Thermal Isolation Alcohol Gas Sensor Activation Process Cantilever Structure Crystallite Size Dielectric Oxide High Snr Humidity Response Zro 2 Mems Structure Multi-Sensor Oxygen Flow Rate Initial Gap Substrate Heating Co Gas Sensor Chemical Stability Electrical Properties Process Variation(PV) Mid-Ir Optimized Method Operating Characteristic Positive Feedback Planar-Type Poly(Ethylene Terephthalate) Substrate Integrated Management System Surface Morphology Silicon Wet Etching Boundary Conditions Detection Systems(IDS) Noise Level Nano-Sized Printing Technology Radio Frequency Identification(RFID) Surface Topology As-Deposited Audible Sound Analog-To-Digital Converters(ADCs) Contact Printing Parameter K Rf Mems Capacitive Switch Large Deformation Electrolyte Materials Alumina Substrate Air Density Damping Effect Film Stress Measurement Power Management Circuit Circuit-Integrated Effective Size High Gain Drop-Coated Research Institute Working Mechanism Practical Application Self-Assembled Monolayers(SAMS) Ubiquitous Sensor Network Annealed Films Error Rate Etching Technique Flat Membrane Molar Ratio Moving Ground Piezoelectric Thin Film Ir Absorption Source Follower Acoustic Radiation Average Error Device Fabrication Film Device Water Droplets 1 H Optimal Transfer Sound Velocity Annealing Effects Barrier Layers Hydrophobic Surface Out-Of-Plane Deformation Sensor Chip Viscous Resistance Semi-Circular Monitoring Method Radio-Frequency Magnetron Sputtering Low Annealing Temperature Li-Ion Battery Charging Scanning Electron Microscope Average Roughness Feedback Signal Xrd Analysis Oxygen Diffusion Reduction Of Graphene Oxide Input Referred Noise Sensor Signal Photolithography Process Smart Devices Saturation Region Aqueous Binder Conventional Methods Change In Resistance Deposition Technique Fundamental Resonant Frequency Front Side Frequency Response Range Finite Element Method Simulation Gas Mixtures Geometric Pattern 20 Hz Noise Performance Security Guarantee Spin-Coated Silicon-Based Fringing Capacitance Full-Scale Mechanical Damping Absolute Pressure Sensor Electric Field Method Fem Simulation Higher Sensitivity Power Supply Poly-2 Si Mems Uv Nanoimprint Detection Method Electrical Permittivity Gravitational Force Oxide Layer Square Root Applied Physics Capture Module Empirical Parameters Ar Plasma Water Wettability Amplification Technique Opposite Direction Proof Mass Signal Line Digital Output Theoretical Calculation Flow Controller Fea Simulation Nano Resonator Reduced Graphene Oxide Side-Wall Equivalent Mass Signal Amplification Acoustic Characteristics Bluetooth Module Capping Layer Electrical Energy Oxide Film Pressure Field Inkjet Printing Three Components Sensitivity Model Crystallization Process Metal Membrane Monolithic Integration Electrode Diameter Vapor Etching Optical Emission Spectroscopy Real Situation Linear Increase Suspended Membrane Sound Wave Thin-Film Coating Uncooled Microbolometer Bottom Electrode Modal Vibration Si-Based Hf Vapor Simulated And Measured Results Wind Noise Wireless Sensor Network (Wsn) Mass Production Membrane Material Non-Contact Output Performance Repeated Measurements Series Connection Sheet Resistance Sensor Response Thermal Cycle Alkali-Earth Metal Alloy Layer Co-Sputtering Method Water Condensation Atomic Force Microscopy (Afm) Mechanical Stability Magnetic Resonance(MR) Output Buffer Polysilicon Piezoresistors Lithium Phosphate High Response System Application Sensor Design Ultrasonic Energy Case Studies Direct Current(DC) Induction Coupling Noise Filters Pmn-Pt Single Crystal Piezoelectric Energy Rf Power Spectroscopy Analysis Cavity Structure Effective Capacitance Xenon Difluoride Thickness Ratio Sputtering Power Trade-Off Gas Sensing Properties High-Precision H 2 Mems Piezoresistive Pressure Sensor Low Deposition Temperature Lithium Cobalt Oxide Lithium Titanate Heat Treatment Structural Properties Gas Barrier Films Parallel Polarized Local Heat Generation Thermal Atomic Layer Deposition X-Ray Diffraction (Xrd) Small Displacement Surface Characterization Grain Size Mass Flow Material Parameter Microphone Readout New Method Encapsulation Technique Air Temperature Audio Frequency Co2 Concentration Dc Power Response Speed Magnetic Intensity Operating Frequency Plasma-Enhanced Chemical Vapor Deposition (Pecvd) Power Constraint Bimorph Cantilever Controlled Voltage Source Co-Sputtered Fabrication Method Metal Carbonates Integrated Impedance Low Electrical Resistivity High Output Impedance Two-Port