ETRI-Knowledge Sharing Plaform

Gas Sensors Acoustic Sensor Micro-Electro-Mechanical System(MEMS) Mems Microphone Open Circuit Capacitive-Type Sensing Material Si Substrate Operating Temperature Sacrificial Layer Fabrication Process Frequency Response Characteristics Sensor Based Gas Concentration Zero-Bias Pull-In Voltage High Sensitivity Temperature Coefficient Of Resistance(TCR) Scanning Electron Microscopy(S.E.M.) Low Power Consumption Gas Response Semiconductor Type Acoustic Actuator 1/F Noise Piezoelectric Ceramics Nano-Powders Recovery Time Alloy Films Sound Pressure Level Back-Plate Structure-Based Tin Oxide Si Film Cmos-Compatible Silicon Film Particle Size Laser Scanning Vibrometer Sound Field Parasitic Capacitance Measurement Range Commercial Products Reference Material Flow Type Stress Reduction Air-Gap Etching Process Detection Limit Active Area Solid Electrolyte Sensing Membrane Sensing Electrode Micro-Heater X-Ray Diffraction Analysis Surface Micromachined Mems Displacement Characteristics Sound Quality Amorphous Silicon High Temperature Natural Environment Thick Films Low Frequency Range Infrared Focal Plane Array(IRRPA) Silicon Substrate Residual Stress Proposed Model Micro Gas Sensor Measurement Condition Conventional Model Surface Micromachining Bias Voltage Response Time Chemical Reaction(Biomimetic) Sound Source Vibrational Displacement Single-Layer Model-Based Gas Detection Dc Bias Infrared Detection Bi-Layer Chip Area Reduction Algorithm Ultrafast Response Solid State Complementary Metal-Oxide-Semiconductor(CMOS) Co-Precipitation Method Metal Dopants High Energy Physical Properties Wireless Power Transfer Systems(WPTS's) Nano-Scale Multi-Layer Sensor Performance Rare Metal Capacitance Model Micromachined Sensor Semiconductor Gas Sensor Measurement Time Mixed Data Reactive Ion Etching(RIE) Lumped Model Stoney Equation Formaldehyde Gas Sensor Silicon Nitride Wireless Sensor Networks(WSNs) Low Noise Equivalent Circuit Modeling Lumped Parameters Sensor Module Gas Measurement Detection Techniques Wireless Sensor Network Applications Ultra-Thin Noise Characteristics Piezoelectric Mems Piezoelectric Single Crystal Cmos Compatibility Measurement Results Nanoimprint Lithography Indoor Environment Plate Anchors O 3 Phase Change Material(PCM) Dry Etching Low Temperature(LT) Creative Technology Vacuum Cavity High Detectivity Screen-Printed Analysis And Simulation Lithium-Ion Batteries(LIBs) High Performance Equivalent Circuit Modelling Crystal Structure Aluminum-Doped Zinc Oxide Mems Capacitive Microphone Flat Frequency Response Front-End Isotropic Etching Sno 2 Higher Frequency Extraction Method Monitoring System Resonant Mode Membrane Displacement 5 Nm Thermal Uniformity 2 Khz Bridge Type Intrinsic Capacitance Limited Power Capacitive Humidity Sensor Inlet Type Vibrational Frequency Real-Time Growth Orientation Mems Sensor Response And Recovery Bottom Electrode Layer-By-Layer(LbL) Research Institute Co Gas Sensor Electrical Properties(I-V curve) Nano-Sized Power Constraint Ultrasonic Energy Barrier Materials Output Buffer Metal Carbonates High Gain Non-Contact Fringing Capacitance Mass Flow High Response Cathode Materials Annealing Effects Piezoelectric Speaker Selectively Etching Deep Rie Dc Power Coplanar Configuration Photolithography Process Crystallite Size Thermal Atomic Layer Deposition Design And Fabrication Uv Nanoimprint 60 Hz Oxygen Gas Electrical Permittivity Membrane Deflection Planar-Type Deposition Technique Contact Resistance(73.40.Cg) Large Signal Ultrasonic Transmitter Small-Signal Modeling Electrical Sensing Average Error Measurement System Acoustic Performance Adaptively Coupled Plasma Angle-Resolved X-Ray Photoelectron Spectroscopy(ARXPS) Front Side Thin Film Stress Finite Element Method Simulation Environmental Monitoring Water Droplets Highly Sensitive Absolute Pressure Sensor Heat Spreading Change In Resistance Bimorph Cantilever Field Effect Transistors(Substrate temperature) Monitoring Method Noise Performance Bluetooth Module Circular Diaphragm Transfer Frequency Relative Thickness Real Situation Large Deformation Micromachining Technique Noise Level Film Stress Measurement Simulated And Measured Results Repeated Measurements Mid-Ir White Noise Signal Material Combination Co-Sputtered High Output Impedance Feedback Signal Mean Stress High-Precision Encapsulation Technique Carbon Dioxide Measured Frequency Temperature Range Drop-Coated Lithium Carbonate Alumina Substrate Contact Printing Uncooled Microbolometer Ion Bombardment Suspended Membrane Co2 Concentration Poly-2 Capping Layer Durability Improvement Series Connection Annealed Films Normal Operation Crystallization Process Crystalline Structure Passive Radio Frequency Identification(RFID) Monolayer Coating A-Si:H Etching Selectivity Frame Rate Noise Filter Variation Rate Pmn-Pt Single Crystal Grain Size Parallel Polarized Lithium Cobalt Oxide Natural Frequency Audio Frequency Gas Sensor Applications Linear Increase Gravitational Force Room-Temperature Activation Process Numerical Simulations Trade-Off Sensor Response Electrical Energy Input Referred Noise Sensor Bias Etching Technique Thermal Evaporation Warm-Up Monitoring Applications Sensor Design Response Speed Noise Equivalent Temperature Difference Post-Annealing Treatment Geometric Pattern Sensor Chip Applied Physics Cavity Structure Volume Effects Square Root Signal-To-Noise Controlled Voltage Source Spectroscopy Analysis Audible Sound Al Electrodes Total Harmonic Distortion Infrared (Ir) Sensor Infrared Absorption Mechanical Stability Power Management Circuit Experiment And Simulation Atomic Force Microscopy (Afm) Xenon Difluoride Air Temperature Optical Microscopy Printing Technology Self-Assembled Monolayers(SAMs) Silicon Wet Etching Average Roughness Surface Topology Piezoelectric Thin Film Surface Morphology Out-Of-Plane Deformation Lithium Titanate Wind Noise Security Guarantee Operating Characteristics Electrolyte Materials Heat Treatment Initial Gap Material Parameter Rf Power Low Resistivity VO 2 Magnetic Intensity Poly(Ethylene-Co-Vinyl Alcohol) Zro 2 Flow Controller Security Cases Molar Ratio Thermal Time Constant(TTC) Sensor Signal Fundamental Resonant Frequency Reduction Of Graphene Oxide Silicon-Based Resistance Change Radio Frequency Magnetron Sputtering Electro-Mechanical Coupling Coefficient Sensor Node Acoustic Pressure Pressure Field Li-Ion Battery Charging Buffered Hf Output Performance Semi-Circular Spring Constant Device Fabrication Lithium Manganese Oxide Vibration Characteristics Monolithic Integration Compressive Stress Crystalline State Parallel Connection Wireless Sensor Network (Wsn) Theoretical Calculation Thermal Properties Barrier Layers Analog To Digital Converter(ADC) Sensitivity Model Sputtering Conditions Boundary Conditions Finite Element Analysis (Fea) Direct Etching As 2 Alkali-Earth Metal Water Condensation Oxygen Flow Rate Lumped Spring-Mass Model Plasma-Enhanced Ald Lower Power Optimal Transfer New Method Voltage Booster Signal Line Intrusion Detection Technique Nitrogen Oxide Numerical Analysis Parameter K Operating Frequency Fabrication Method Analytical Model Screen Printing Technique X-Ray Diffraction (Xrd) Modal Vibration Bulk Micromachining Saturation Region Nonlinear Response Damping Ratio Si Mems High-Power Piezoelectric Integrated Impedance Gaussian White Noise High Snr Hydriodic Acid Mechanical Damping Plasma-Enhanced Atomic Layer Deposition Activation Technique Practical Application Surface Water Sampling Frequency Thermal Cycle Electric Field Method Sound Performance Circuit-Integrated Side-Wall Phase-Change Random Access Memory(PRAM) Current Consumption Signal Processing Oxygen Diffusion Polysilicon Piezoresistors Conventional Methods Film Device Air Density Hf Vapor State Modeling Chemical Stability Acoustic Characteristics Substrate Heating Reference Current Monolithic Integrated Alcohol Gas Sensor Signal Noise Ratio(SNR) Licoo 2 Fem Simulation Wide Dynamic Range(WDR) Optical Emission Spectroscopy Rf Magnetron Sputtering Technique Metal Membrane Wet Process Reduced Graphene Oxide(rGO) It Depends Gas Barrier Films Aqueous Solution Reference Electrode Structural Properties Microphone Readout Cobalt Oxides Alloy Layer NH 3 Lattice Distortion Fea Simulation Low Sensitivity Interdigitated Electrodes Cantilever Structure Induction Coupling Dielectric Oxide Device Size Effective Capacitance Frequency Characteristics Intrusion Detection System(IDS) Positive Feedback Humidity Response Comparative Study Mems Accelerometers Improved Sensitivity Full Scale Spin-Coated Water Wettability Acoustic Radiation Piezoelectric Energy Indium Oxide Disturbance Environment Electrode Diameter Process Variation(PV) Flat Membrane Small Displacement Optimized Method Oxide Layer Local Heat Generation Sheet Resistance Mems Piezoresistive Pressure Sensor Error Rate Detection Method Pressure Response Atomic Force Microscope(AFM) Effective Size Two-Port Direct Current(DC) Parallel Plate Capacitor Surface Properties Ar Plasma Mass Production Pvdf Film Double Layer Digital Output Lithium Phosphate Voltage Controlled Low Thermal Conductivity Empirical Parameters 20 Hz Moving Ground Vacuum Sealing Low Electrical Resistivity Si-Based Ar Gas Energy Conversion Efficiency Structural Parameters Equivalent Mass Novel Process Tensile Stress Infrared Sensor Data Acquisition Board Sound Wave Fire Detection System Readout Integrated Circuit Unique Solution Active Devices Low Annealing Temperature Proof Mass Sputtering Power Fabricated Surface Co-Sputtering Method Vapor Etching Xrd Analysis Sound Velocity Mems Structure Ubiquitous Sensor Network Offset Voltage Thickness Ratio Capture Module Amplification Technique Different Order Hydrophilic Surface Power Applications Standard Cmos Process As-Deposited Noise Factor Experimental Study Integrated Process Opposite Direction Chemical Vapour Deposition(CVD) Etching Mechanism Surface Characterization Magnetic Resonance(MR) Specific Detectivity Consumer Electronics Personal Computer(PC) Membrane Material Dynamic Responses Process Layer Contact Angle(CA) Rf Mems Capacitive Switch Source Follower Post-Annealed Thermal Decomposition 1 H Case Studies Low Deposition Temperature Three Components Gas Sensing Properties Low Stress Co2 Sensor Relative Humidity 3.5 Ghz Low Snr Gas Mixture Hydrophobic Surface Thermal Annealing Nano-Resonator Wavelength Range Low Substrate Temperature Low Input Impedance Relative Displacement Capacitive Mems Accelerometer Ir Absorption Poly(Ethylene Terephthalate) Substrate Gas Flow Rate Natural Resonance Frequency Air Damping Monitoring Service System Application Low-Cost Thermal Isolation Smart Sensor Working Mechanism Response Curves Inkjet Printing Design And Optimization Piezoelectric Membrane Sick Building Syndrome(SBS) Personal Digital Assistant(PDA) Higher Sensitivity Power Supply Gas Sensing Behavior Signal Amplification Electromotive Force (Emf) Scanning Electron Microscope Security Monitoring Polyvinylidene Difluoride(PVDF) Inlet Structure H 2 Oxide Film Viscous Resistance Damping Effect Micro-Sensor Standard Deviation(STD) Surface Treatments Plasma-Enhanced Chemical Vapor Deposition (Pecvd) Frequency Response Range Metal Oxide Gas Sensor