대형 엑스선 광학계, 나노 계측, 소각 엑스선 산란, 2차원 엑스선 광원, 초정밀 가공, 측정 표준, Large X-ray optics, Nanometrology, Small Angle X-ray Scattering, 2D x-ray source, Ultra-precision machining, Measurement standards
KSP Keywords
High Speed, Semiconductor nanostructures, X-Ray, X-ray sources, non-destructive
Funding Org.
과학기술정보통신부
Research Org.
한국전자통신연구원
Project Code
23JB4700, Development of high-speed, non-destructive metrology based on novel X-ray sources and custom optics for inspection of nanostructures in a semiconducto,
Jeong Jin-Woo
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