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Acoustic Sensor Capacitive-Type Mems Microphone Open Circuit Zero-Bias High Sensitivity Sacrificial Layer Sensing Electrodes Pull-In Voltage Fabrication Process Back-Plate Dc Bias Structure-Based Mems Accelerometers Silicon Substrate Proposed Model Mems Actuators Surface Micromachined Mems Bottom Electrode Si Substrate Cmos Compatibility Plate Anchors Parasitic Capacitance Creative Technology Equivalent Circuit Modelling Mems Capacitive Microphone Vacuum Cavity Active Area Extraction Method High-Resolution Insertion Loss Intrinsic Capacitance Isotropic Etching Membrane Displacement Sensing Membrane High Aspect Ratio Inlet Type Icp Etching Inclination Angle Model-Based Sensor Based Spring Constant Chip Area Computed Tomography(C.T) Monolithic Integrated Rf Mems Switches Si Mems Cmos-Compatible Active Devices Integrated Process Lumped Model Mixed Data Readout Integrated Circuit Vertical Electrodes Equivalent Circuit Modeling Comb Electrodes Deep Reactive Ion Etching Lumped Parameters Amorphous Si Actuation Voltage Electrical Sensing Conversion Operation Capacitive Sensor Design And Fabrication Dry Etching Leakage Current Measurement Results Multi-Frequency Mechanical Vibration Metal Plate On-Chip Photolithography Process Small-Signal Modeling Sensing Applications Ultrasonic Devices Selectively Etching Vacuum Pump Air-Gap Absolute Pressure Sensor Bulk-Micromachined Circular Diaphragm Comb Fingers Crystalline Silicon Etching Selectivity Flat Frequency Response High-Precision High Performance Harmful Algal Blooms Highly Sensitive High Output Impedance Insulator Layer Nano Resonator Pull-Down Poly-2 Stopper System Self-Reset 6 Ghz Water Quality Sensor Front-End Tunable Sensitivity Temperature Coefficient Treatment Process Variable Resolution Vibration Environment Vibration Exciter Detection Limit Etching Process Gravitational Force Led Lighting Low Supply Voltage Natural Frequency Off-State Quad-Band Rf Switch Xenon Difluoride Surface Topology Sensor Design Sensor Chip Volume Effects Ultralow Power(ULP) Ac Voltage Acoustic Pressure Clock Frequency Device Fabrication Displacement Characteristics Electrostatic Actuators Extensional Mode Initial Gap Loading Effect Monolithic Integration Mems Sensor Position Sensing Sensor Applications Total Power Consumption Theoretical Calculation Thermal Treatments Sensitivity Model Ultrasonic Transducer Analytical Model Bulk Micromachining Circuit-Integrated Device Performance Direct Etching Electric Field Method Fabrication Method High Quality Factor Integrated Impedance Lumped Spring-Mass Model Low-Power Cmos Multi-Band Micro Accelerometer Polysilicon Piezoresistors Power Device Process Layers Power Performance Practical Application Sensor Networks Wireless Sensor Wet Etching Decoding Model Side-Wall Signal Line Anti-Resonance Peak Capacitance Model Digital Output Error Rate Fem Simulation Frequency Characteristics Improved Sensitivity It Depends Load Impedance Low Sensitivity Liquid Environment Micromachined Sensor Metal Membrane Maximum Output Power Multi-Layer Mems Piezoresistive Pressure Sensor Mems Resonators Micromachined Accelerometer Parallel Plate Capacitor Pulse Signal Residual Stress Reference Electrode Spin-Coated Silicon On Insulator(SOI) Sensing Resolution Si Surface Etching Small Displacement Sensor Performance Ubiquitous Sensor Network Equivalent Mass Broadband Frequency Capture Module Comb Structure Dynamic Responses Empirical Parameters Fabricated Surface High Isolation Low Voltage Moving Ground Morphological Defects Offset Voltage Opposite Direction Piezoelectric Power Generator Phase Locked Loop(PLL) Reset Operation Resonant Frequency(Fr) 2 Mm Standard Cmos Process Structural Parameters Vacuum Sealing Microelectromechanical System (Mems) Tensile Stress 3 V Bias Voltage Air Damping Capacitive Mems Accelerometer Cmos Logic Defect-Free Front-Side Inlet Structure Low Input Impedance Low Loss Liquid Phase Logic Technology Low Power Dissipation Manipulating System Out-Of-Plane Pulse Width Relative Displacement Time-To-Digital Conversion(TDC) High Speed Standard Deviation(STD) Sensor Module Viscous Resistance Interface Circuit Smart Sensor