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Acoustic Sensor Capacitive-Type Mems Microphone Open Circuit Zero-Bias High Sensitivity Sacrificial Layer Sensing Electrodes Pull-In Voltage Fabrication Process Dc Bias Back-Plate Structure-Based Mems Accelerometers Silicon Substrate Proposed Model Mems Actuators Surface Micromachined Mems Cmos Compatibility Si Substrate Bottom Electrode Parasitic Capacitance Plate Anchors Creative Technology Vacuum Cavity Mems Capacitive Microphone Equivalent Circuit Modelling Active Area Extraction Method High-Resolution Isotropic Etching Insertion Loss Intrinsic Capacitance Membrane Displacement Sensing Membrane Sensor Based High Aspect Ratio Inlet Type Icp Etching Inclination Angle Model-Based Spring Constant Chip Area Computed Tomography(C.T) Monolithic Integrated Rf Mems Switches Si Mems Cmos-Compatible Active Devices Vertical Electrodes Integrated Process Lumped Model Mixed Data Readout Integrated Circuit Comb Electrodes Deep Reactive Ion Etching Equivalent Circuit Modeling Lumped Parameters Amorphous Si Actuation Voltage Capacitive Sensor Conversion Operation Dry Etching Design And Fabrication Vacuum Pump Ultrasonic Devices Electrical Sensing Leakage Current Measurement Results Multi-Frequency Mechanical Vibration Metal Plate On-Chip Photolithography Process Small-Signal Modeling Selectively Etching Sensing Applications Temperature Coefficient Treatment Process Air-Gap Absolute Pressure Sensor Circular Diaphragm Crystalline Silicon Comb Fingers Bulk-Micromachined Tunable Sensitivity 6 Ghz Variable Resolution Vibration Environment Vibration Exciter Water Quality Sensor Nano Resonator Etching Selectivity Flat Frequency Response Front-End Harmful Algal Blooms High Performance High-Precision Highly Sensitive High Output Impedance Insulator Layer Poly-2 Pull-Down Self-Reset Stopper System Detection Limit Volume Effects Xenon Difluoride Etching Process Gravitational Force Led Lighting Low Supply Voltage Natural Frequency Off-State Quad-Band Rf Switch Sensor Design Surface Topology Sensor Chip Thermal Treatments Theoretical Calculation Ac Voltage Acoustic Pressure Clock Frequency Device Fabrication Displacement Characteristics Total Power Consumption Ultralow Power(ULP) Electrostatic Actuators Extensional Mode Initial Gap Loading Effect Monolithic Integration Mems Sensor Position Sensing Sensitivity Model Sensor Applications Analytical Model Circuit-Integrated Decoding Model Device Performance Direct Etching Bulk Micromachining Ultrasonic Transducer Side-Wall Wireless Sensor Wet Etching Electric Field Method Fabrication Method High Quality Factor Integrated Impedance Lumped Spring-Mass Model Low-Power Cmos Multi-Band Micro Accelerometer Polysilicon Piezoresistors Power Device Power Performance Practical Application Signal Line Sensor Networks Anti-Resonance Peak Capacitance Model Digital Output Parallel Plate Capacitor Sensor Performance Error Rate Fem Simulation Frequency Characteristics Improved Sensitivity It Depends Load Impedance Low Sensitivity Liquid Environment Multi-Layer Mems Piezoresistive Pressure Sensor Micromachined Sensor Metal Membrane Maximum Output Power Mems Resonators Micromachined Accelerometer Pulse Signal Residual Stress Reference Electrode Spin-Coated Small Displacement Sensing Resolution Silicon On Insulator(SOI) Si Surface Etching Tensile Stress Capture Module Comb Structure Dynamic Responses Broadband Frequency Ubiquitous Sensor Network Vacuum Sealing Empirical Parameters Equivalent Mass Fabricated Surface High Isolation Low Voltage Microelectromechanical System (Mems) Moving Ground Morphological Defects 2 Mm Offset Voltage Opposite Direction Piezoelectric Power Generator Process Layer Phase Locked Loop(PLL) Resonant Frequency(Fr) Reset Operation Standard Cmos Process Structural Parameters 3 V Air Damping Cmos Logic Defect-Free Bias Voltage Time-To-Digital Conversion(TDC) Viscous Resistance Capacitive Mems Accelerometer Front-Side High Speed Inlet Structure Interface Circuit Low Input Impedance Liquid Phase Manipulating System Logic Technology Low Power Dissipation Low Loss Out-Of-Plane Pulse Width Relative Displacement Sensor Module Standard Deviation(STD) Smart Sensor