Subjects :
etching mechanism
논문 검색결과
| Type |
Year |
Title |
Cited |
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Journal
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2014 |
Surface Properties of ZrO2 Thin Film Under Cl2/Ar Plasma Using Angle-Resolved X-Ray Photoelectron Spectroscopy
Woo Jong Chang Japanese Journal of Applied Physics, v.53, no.8S3, pp.1-6 |
3 |
원문
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Journal
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2012 |
Etching Characteristics and Mechanisms of TiO2 Thin Films in HBr/Ar and Cl2/Ar Inductively-Coupled Plasmas
장한별 Plasma Chemistry and Plasma Processing, v.32, no.2, pp.333-342 |
3 |
원문
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Journal
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2011 |
Analysis of Etching Mechanism and Etched Slope Control of Silicon for Nanoimprinting Lithography
함용현 Journal of Nanoscience and Nanotechnology, v.11, no.7, pp.6523-6527 |
0 |
원문
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Journal
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2008 |
Model-Based Analysis of the ZrO2 Etching Mechanism in Inductively Coupled BCl3/Ar and BCl3/CHF3/Ar Plasmas
김만수 ETRI Journal, v.30, no.3, pp.383-393 |
10 |
원문
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특허 검색결과
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Family Pat. |
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연구보고서 검색결과
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