Subject

Subjects : Poly-silicon

  • Articles (3)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2011 Sub-30 nm Gate Template Fabrication for Nanoimprint Lithography Using Spacer Patterning Technology   Park Kun Sik  Journal of Nanoscience and Nanotechnology, v.11, no.2, pp.1625-1628 5 원문
Journal 2006 Micromachined Air-Gap Structure MEMS Acoustic Sensor using Reproducible High-Speed Lateral Etching and CMP Process   Sang Choon Ko  Journal of Micromechanics and Microengineering, v.16, no.10, pp.2071-2076 15 원문
Journal 2006 Characterization of silicon–germanium heterojunction bipolar transistors degradation in silicon–germanium BiCMOS technologies   Lee Seung-Yun  Solid-State Electronics, v.50, no.3, pp.333-339 4 원문
특허 검색결과
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연구보고서 검색결과
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