Subjects : Sputtering system
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Journal | 2018 | Characterization of Bilayer AZO Film Grown by Low-Damage Sputtering for Cu(In,Ga)Se2 Solar Cell with a CBD-ZnS Buffer Layer Lee Woo Jung Materials Science in Semiconductor Processing, v.81, pp.48-53 | 9 | 원문 |
| Journal | 2017 | Large Size of Capacitive Window-Unified TSP Using by Contact Hole Type as an Insulator Seo Woo Hyung Journal of Nanoscience and Nanotechnology, v.17, no.5, pp.3089-3091 | 0 | 원문 |
| Journal | 2011 | Amorphous In-Sn-Zn-O Films Deposited on Polymer and Glass Substrates Using Co-Sputtering System 방준호 Journal of Nanoelectronics and Optoelectronics, v.6, no.3, pp.369-374 | 0 | 원문 |
| Status | Year | Patent Name | Country | Family Pat. | KIPRIS |
|---|---|---|---|---|---|
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| Type | Year | Research Project | Primary Investigator | Download |
|---|---|---|---|---|
| Final Report | 2018 | Development of High Magnetron Sputtering System for Ultra High-Resolution ICT Devices | Cho Sung Haeng |