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연구보고서 검색
Type Funding Org. Research Org.
Year ~ Keyword

Detail

4K 이상 고해상도 ICT 디바이스용 High Gauss Magnetron Sputtering System 개발
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Participants
정현재, 김성현, 조성행, 이수재
Published
201806
Type
Final Report
Keyword
산화물 반도체, 박막 트랜지스터, 구리 비저항
KSP Keywords
High resolution, Magnetron sputtering, Magnetron sputtering system, Sputtering system
Funding Org.
과학기술정보통신부
Research Org.
아바코
Project Code
17HB3700, Development of High Gauss Magnetron Sputtering System for High Resolution ICT Devices over 4K, Cho Sung Haeng