Subjects :
Hydrogen silsesquioxane (HSQ)
논문 검색결과
| Type |
Year |
Title |
Cited |
Download |
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Journal
|
2024 |
Improved frequency performance in AlGaN/GaN HEMTs on Si using hydrogen silsesquioxane-assisted gate
Jung Hyunwook Materials Science in Semiconductor Processing, v.170, pp.1-5 |
3 |
원문
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|
Journal
|
2010 |
Sub-50 nm Template Fabrications for Nanoimprint Lithography Using Hydrogen Silsesquioxane and Silicon Nitride
Shim Jae Yeob Journal of Nanoscience and Nanotechnology, v.10, no.5, pp.3628-3630 |
4 |
원문
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|
Journal
|
2006 |
Fabrication of Nanoimprinted Curved Feature for Focusing Grating Coupler using Hydrogen Silsesquioxane Mold
Ryu Hojun Current Applied Physics, v.6, no.1, pp.e121-e124 |
1 |
원문
|
|
Journal
|
2006 |
Formation of a Self-Aligned Hard Mask using Hydrogen Silsesquioxane
Kiju Im Applied Physics Letters, v.88, no.15, pp.1-3 |
3 |
원문
|
특허 검색결과
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Family Pat. |
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연구보고서 검색결과
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