Subject

Subjects : Plasma process

  • Articles (3)
  • Patents (1)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Conference 2018 P2GS.13 - Fabrication of ZnO-Based Ethanol Gas Sensors Using Aerosol-Assisted Atmospheric Pressure Plasma   Kim Doyeob  International Meeting on Chemical Sensors (IMCS) 2018, pp.792-793 원문
Journal 2013 Fabrication of Enhancement-Mode AlGaN/GaN High Electron Mobility Transistors Using Double Plasma Treatment   Jong-Won Lim  Thin Solid Films, v.547, pp.106-110 10 원문
Journal 2009 Channel Protection Layer Effect on the Performance of Oxide TFTs   Park Sang-Hee  ETRI Journal, v.31, no.6, pp.653-659 77 원문
특허 검색결과
Status Year Patent Name Country Family Pat. KIPRIS
Registered 2015 APPARATUS FOR MONITORING GAS AND PLASMA PROCESS EQUIPMENT INCLUDING THE SAME UNITED STATES
연구보고서 검색결과
Type Year Research Project Primary Investigator Download
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