Subjects : High density plasma (HDP)
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Conference | 2017 | P‐10: High‐Density Plasma Sputtered InZnSnO Thin‐Film Transistors Fabricated by Back Channel Etching Method on Flexible Polyimide Substrate Cho Sung Haeng Society for Information Display (SID) International Symposium 2017, pp.1262-1264 | 6 | 원문 |
| Journal | 2016 | Conductive Polymer Synthesis with Single-Crystallinity via a Novel Plasma Polymerization Technique for Gas Sensor Applications 박춘상 Materials, v.9, no.10, pp.1-11 | 48 | 원문 |
| Other | 2016 | Highly Stable Oxide Semiconductor TFTs deposited by High Density Plasma Cho Sung Haeng 중국 BOE, pp.1-46 | ||
| Conference | 2015 | The Highly Stable InGaZnO TFTs Deposited by High Density Plasma Sputtering Cho Sung Haeng International Thin-Film Transistor Conference (ITC) 2015, pp.17-18 |
| Status | Year | Patent Name | Country | Family Pat. | KIPRIS |
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| Type | Year | Research Project | Primary Investigator | Download |
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