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Journal
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2015 |
A Concave-Patterned TiN/PECVD-Si3N4 /TiN Diaphragm MEMS Acoustic Sensor Based on a Polyimide Sacrificial Layer
Jaewoo Lee Journal of Micromechanics and Microengineering, v.25, no.12, pp.1-13 |
8 |
원문
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Conference
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2013 |
A Surface Micromachined MEMS Capacitive Microphone with Back-Plate Supporting Pillars
Chang Han Je SENSORS 2013, pp.1-4 |
6 |
원문
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Conference
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2013 |
A Bottom-Inlet type MEMS Acoustic Sensor with Wheel-Shaped Back-Plate Anchor
Jaewoo Lee EUROCON 2013, pp.2116-2122 |
0 |
원문
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Conference
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2011 |
A Surface-Micromachined MEMS Acoustic Sensor with Back-Plate Anchors of 100 μm Depth
Jaewoo Lee SENSORS 2011, pp.1-4 |
6 |
원문
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