Subjects : Helicon plasma
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Journal | 2007 | Fabrication of Oxide TFTs with Al2O3/ZnO Gate Stacks Patterned Using a Dry Etching Method Yoon Sung Min Electrochemical and Solid-State Letters, v.11, no.2, pp.J15-J18 | 10 | 원문 |
| Journal | 2006 | Dry Etching of Ge2Sb2Te5 Thin Films into Nanosized Patterns Using TiN Hard Mask Yoon Sung Min Japanese Journal of Applied Physics, v.45, no.40, pp.1080-1083 | 21 | 원문 |
| Journal | 2005 | Etching Characteristics of Ge2Sb2Te5 Using High-Density Helicon Plasma for the Nonvolatile Phase-Change Memory Applications Yoon Sung Min Japanese Journal of Applied Physics, v.44, no.24-27, pp.L869-L872 | 36 | 원문 |
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| Type | Year | Research Project | Primary Investigator | Download |
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