Subject

Subjects : Optical lithography

  • Articles (3)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2024 Quantum electrodynamical formulation of photochemical acid generation and its implications on optical lithography   Seungjin Lee  ETRI Journal, v.46, no.5, pp.774-782 1 원문
Journal 2011 Sub-30 nm Gate Template Fabrication for Nanoimprint Lithography Using Spacer Patterning Technology   Park Kun Sik  Journal of Nanoscience and Nanotechnology, v.11, no.2, pp.1625-1628 5 원문
Journal 2008 Electrical Characterization of ZnO Single Nanowire Device for Chemical Sensor Application   Kim Eunkyoung  Journal of Nanoscience and Nanotechnology, v.8, no.9, pp.4698-4701 8 원문
특허 검색결과
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연구보고서 검색결과
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