Subject

Subjects : Surface micromachined

  • Articles (7)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Conference 2016 High Sensitivity Surface Micromachined Absolute Pressure Sensor   Chang Han Je  Eurosensors 2016, pp.1-4 18 원문
Journal 2016 Surface Micromachined Pressure Sensor with Substrate Internal Vacuum Cavity   Chang Han Je  ETRI Journal, v.38, no.4, pp.685-694 2 원문
Conference 2014 The Effect of Back-Chamber Volume on the Surface Micromachined Acoustic Sensor   Chang Han Je  SENSORS 2014, pp.1-4 2 원문
Conference 2013 A Surface Micromachined MEMS Capacitive Microphone with Back-Plate Supporting Pillars   Chang Han Je  SENSORS 2013, pp.1-4 6 원문
Conference 2011 The Novel Sensitivity Improved Surface Micromachined MEMS Microphone with the Center-Hole Membrane   Chang Han Je  Eurosensors 2011, pp.583-586 7 원문
Conference 2006 Surface Micromachined MEMS Devices by Novel Dry Release Process   Jang Won Ick  한국반도체 학술 대회 (KCS) 2006, pp.1-2
Journal 2004 Surface micromachined thermally driven micropump   Jang Won Ick  Sensors and Actuators A : Physical, v.115, no.1, pp.151-158 21 원문
특허 검색결과
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연구보고서 검색결과
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