Subjects :
Surface micromachined
논문 검색결과
| Type |
Year |
Title |
Cited |
Download |
|
Conference
|
2016 |
High Sensitivity Surface Micromachined Absolute Pressure Sensor
Chang Han Je Eurosensors 2016, pp.1-4 |
18 |
원문
|
|
Journal
|
2016 |
Surface Micromachined Pressure Sensor with Substrate Internal Vacuum Cavity
Chang Han Je ETRI Journal, v.38, no.4, pp.685-694 |
2 |
원문
|
|
Conference
|
2014 |
The Effect of Back-Chamber Volume on the Surface Micromachined Acoustic Sensor
Chang Han Je SENSORS 2014, pp.1-4 |
2 |
원문
|
|
Conference
|
2013 |
A Surface Micromachined MEMS Capacitive Microphone with Back-Plate Supporting Pillars
Chang Han Je SENSORS 2013, pp.1-4 |
6 |
원문
|
|
Conference
|
2011 |
The Novel Sensitivity Improved Surface Micromachined MEMS Microphone with the Center-Hole Membrane
Chang Han Je Eurosensors 2011, pp.583-586 |
7 |
원문
|
|
Conference
|
2006 |
Surface Micromachined MEMS Devices by Novel Dry Release Process
Jang Won Ick 한국반도체 학술 대회 (KCS) 2006, pp.1-2 |
|
|
|
Journal
|
2004 |
Surface micromachined thermally driven micropump
Jang Won Ick Sensors and Actuators A : Physical, v.115, no.1, pp.151-158 |
21 |
원문
|
특허 검색결과
| Status |
Year |
Patent Name |
Country |
Family Pat. |
KIPRIS |
|
No search results. |
연구보고서 검색결과
| Type |
Year |
Research Project |
Primary Investigator |
Download |
|
No search results. |