Subjects : zinc oxide thin films
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Journal | 2013 | Dry Etching Characteristics of Indium Zinc Oxide Thin Films in Adaptive Coupled Plasma Woo Jong Chang Transactions on Electrical and Electronic Materials, v.14, no.4, pp.216-220 | 1 | 원문 |
| Journal | 2013 | Electrical and optical properties of radio frequency magnetron-sputtered lightly aluminum-doped zinc oxide thin films deposited in hydrogen–argon gas Kim Kyung Hyun Thin Solid Films, v.540, pp.142-145 | 4 | 원문 |
| Conference | 2005 | Characteristics of ZnO Thin Films by Means of Plasma Enhanced Atomic Layer Deposition Park Sang-Hee ECS Transactions, pp.125-130 | 2 | 원문 |
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