Subjects :
Capacitive MEMS
논문 검색결과
| Type |
Year |
Title |
Cited |
Download |
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Journal
|
2019 |
Wafer-Level-Based Open-Circuit Sensitivity Model from Theoretical ALEM and Empirical OSCM Parameters for a Capacitive MEMS Acoustic Sensor
Jaewoo Lee Sensors, v.19, no.3, pp.1-14 |
2 |
원문
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|
Conference
|
2010 |
Z-axis Capacitive MEMS Accelerometer with Moving Ground Masses
Chang Han Je SENSORS 2010, pp.635-638 |
2 |
원문
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|
Journal
|
2008 |
Surface-micromachined MEMS acoustic sensor with bottom electrode anchors
Jaewoo Lee Electronics Letters, v.44, no.9, pp.1-2 |
2 |
원문
|
|
Conference
|
2007 |
Design, Fabrication, and Characterization of a Readout Integrated Circuit (ROIC) for Capacitive MEMS Sensors
Lee Myung Lae SENSORS 2007, pp.260-263 |
1 |
원문
|
|
Conference
|
2007 |
A Bidirectional Readout Integrated Circuit (ROIC) with Capacitance-to-Time Conversion Operation for High Performance Capacitive MEMS Accelerometers
Sungsik Lee SENSORS 2007, pp.288-291 |
7 |
원문
|
특허 검색결과
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Family Pat. |
KIPRIS |
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연구보고서 검색결과
| Type |
Year |
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Download |
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