Subject

Subjects : RTA process

  • Articles (3)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Conference 2012 Study of Titanium Silicide with Tin Capping Layer   Park Jong-Moon  대한전자공학회 종합 학술 대회 (하계) 2012, pp.359-362
Journal 2007 Er and Pt Gate Electrodes Formed on SiO2 Gate Dielectrics   Choi Chel-Jong  Electrochemical and Solid-State Letters, v.11, no.2, pp.H22-H25 0 원문
Journal 2007 Thermal Annealing Effects on the Electrical Characteristics of the Back Interface in Nano-silicon-on-insulator Channel   조원주  Applied Physics Letters, v.90, no.14, pp.1-3 9 원문
특허 검색결과
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연구보고서 검색결과
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