Subject

Subjects : Si etching

  • Articles (4)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2015 Low Power Consumption Micro C2H5OH Gas Sensor Based on Micro-Heater and Ink Jetting Technique   Moon Seungeon  Sensors and Actuators B : Chemical, v.217, pp.146-150 29 원문
Conference 2013 Sub-22 nm Silicon Template Nanofabrication by Advanced Spacer Patterning Technique for NIL Applications   Park Jong-Moon  Alternative Lithographic Technologies V (SPIE 8680), pp.1-8 0 원문
Journal 2002 Active-Matrix Field Emission Display with Amorphous Silicon Thin-Film Transistors and Mo-Tip Field Emitter Arrays   Yoon-Ho Song  ETRI Journal, v.24, no.4, pp.290-298 26 원문
Journal 2002 액티브-매트릭스 캐소드를 위한 비정질 실리콘 박막 트랜지스터와 Mo-팁의 집적화 및 특성 분석   Kim Do-Hyung  IEEE Transactions on Electron Devices, v.49, no.7, pp.1136-1142 3 원문
특허 검색결과
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연구보고서 검색결과
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