Subjects :
Sputtering power
논문 검색결과
| Type |
Year |
Title |
Cited |
Download |
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Journal
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2018 |
Deposition Pressure Dependent Electric Properties of (Hf, Zr)O2 Thin Films Made by RF Sputtering Deposition Method
Moon Seungeon Journal of the Korean Physical Society, v.73, no.11, pp.1712-1715 |
0 |
원문
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Journal
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2018 |
Characterization of Bilayer AZO Film Grown by Low-Damage Sputtering for Cu(In,Ga)Se2 Solar Cell with a CBD-ZnS Buffer Layer
Lee Woo Jung Materials Science in Semiconductor Processing, v.81, pp.48-53 |
9 |
원문
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|
Journal
|
2010 |
Effect of High Temperature Post-Annealing of La0.7Sr0.3MnO3 Films Deposited by Radio Frequency Magnetron Sputtering on SiO2/Si Substrates Heated at Low Temperature
최선규 Thin Solid Films, v.518, no.15, pp.4432-4436 |
3 |
원문
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|
Journal
|
2008 |
Process compatible silicon–germanium–antimony heating layer for high density phase-change memory applications
Lee Seung-Yun Microelectronic Engineering, v.85, no.12, pp.2342-2345 |
5 |
원문
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|
Journal
|
2008 |
Nonvolatile Memory-Switching Behaviors of Phase-Change Memory Devices Using Ti-Si-N Heating Layers
Yoon Sung Min Journal of the Electrochemical Society, v.155, no.6, pp.H421-H425 |
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특허 검색결과
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Family Pat. |
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연구보고서 검색결과
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