Subject

Subjects : gas flow rate

  • Articles (5)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2025 Growth Behaviors of InAs/GaAs Quantum Dots Using Metal−Organic Chemical Vapor Deposition with Dual-Channel AsH3 Supply and H2 Carrier Gas Flow Rate Variation   김호성  Crystal Growth and Design, v.25, no.16, pp.6628-6635 원문
Journal 2011 Etching characteristics and mechanism of Ga-doped ZnO thin films in inductively-coupled HBr/X (X = Ar, He, N2, O2) plasmas   함용현  Vacuum, v.85, no.11, pp.1021-1025 10 원문
Journal 2010 Etching Characteristics and Mechanism of ZnO and Ga-Doped ZnO Thin Films in Inductively Coupled HBr/Ar/CHF3 Plasma   함용현  Japanese Journal of Applied Physics, v.49, no.8 PART 2, pp.1-5 5 원문
Journal 2010 Effect of High Temperature Post-Annealing of La0.7Sr0.3MnO3 Films Deposited by Radio Frequency Magnetron Sputtering on SiO2/Si Substrates Heated at Low Temperature   최선규  Thin Solid Films, v.518, no.15, pp.4432-4436 3 원문
Journal 2009 Control of the Thickness and Length of Germanium-Telluride Nanowires Via the Vapor-Liquid-Solid Method   Jung Soonwon  Journal of the Korean Physical Society, v.54, no.2, pp.653-659 6 원문
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