Subject

Subjects : MEMS process

  • Articles (4)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Conference 2018 ZnO Nanowire-based Capacitive Humidity Sensor Integrated on a Polyimide Layer with a Micro-heater   Jaewoo Lee  International Conference and Exhibition for Nanotechnology (NANOPIA) 2018, pp.1-1
Journal 2017 Low Power Consumption Solid Electrochemical-Type Micro CO2 Gas Sensor   Jaewoo Lee  Sensors and Actuators B : Chemical, v.248, pp.957-960 41 원문
Journal 2015 Low Power Consumption Micro C2H5OH Gas Sensor Based on Micro-Heater and Ink Jetting Technique   Moon Seungeon  Sensors and Actuators B : Chemical, v.217, pp.146-150 29 원문
Journal 2010 Low Power Consumption and High Sensitive NO2 Micro Gas Sensor based on Co-planar Micro-heater fabricated by using CMOS-MEMS Process   Moon Seungeon  Journal of the Korean Physical Society, v.56, no.1, pp.434-438 12 원문
특허 검색결과
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연구보고서 검색결과
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