Subjects : Silicon etching
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Journal | 2014 | The Fabrication of an Applicative Device for Trench Width and Depth Using Inductively Coupled Plasma and the Bulk Silicon Etching Process Woo Jong Chang Transactions on Electrical and Electronic Materials, v.15, no.1, pp.49-54 | 1 | 원문 |
| Journal | 2009 | Adjusting Resonant Wavelengths and Spectral Shapes of Ring Resonators using a Cladding SiN Layer or KOH Solution Park Sahnggi Optics Express, v.17, no.14, pp.11884-11891 | 8 | 원문 |
| Conference | 2008 | Fabrication and Characterization of Surface-Micromachined Compact Microheater for Gas Sensing Applications Jaewoo Lee Conference on Nanotechnology (IEEE-NANO) 2008, pp.476-479 | 1 | 원문 |
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| Type | Year | Research Project | Primary Investigator | Download |
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