Subject

Subjects : MEMS accelerometers

  • Articles (4)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Conference 2010 Z-axis Capacitive MEMS Accelerometer with Moving Ground Masses   Chang Han Je  SENSORS 2010, pp.635-638 2 원문
Conference 2008 Sensitivity Tunable Capacitive Type Micro Accelerometer   Chang Han Je  SENSORS 2008, pp.1020-1023 4 원문
Conference 2007 Sensing gap reconfigurable capacitive type MEMS accelerometer   Chang Han Je  Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV (SPIE 6800), v.6800, pp.1-7 5 원문
Conference 2007 A Bidirectional Readout Integrated Circuit (ROIC) with Capacitance-to-Time Conversion Operation for High Performance Capacitive MEMS Accelerometers   Sungsik Lee  SENSORS 2007, pp.288-291 7 원문
특허 검색결과
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연구보고서 검색결과
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