패밀리특허 검색결과
Status	Patent	Country	KIPRIS
Registered	멤스 마이크로폰 및 그 제조 방법	KOREA
Registered	MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) MICROPHONE AND METHOD OF MANUFACTURING THE SAME	UNITED STATES
Registered	MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) MICROPHONE AND METHOD OF MANUFACTURING THE SAME	UNITED STATES