17ZB2100, Study on high precision nano resonator based on electrical sensing for smart sensors,
Yang Yil Suk
Abstract
<연구내용 및 범위> - 나노공진기 소자 구조/동작 시뮬레이션 및 최적 구조 도출 - 전기적 구동/감지 회로 시뮬레이션 및 최적 구조 도출 - 질량 감지용 SiP 나노공진기 모듈 성능/구조사양 도출 - 나노공진기 스마트센서 응용분야/요구사항 도출
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