07MB1300, Set-up of Research Infra for IT Fusion Technology,
Jin-Yeong Kang
Abstract
가. 최종 연구목표 정보통신용 IT 융합기술의 핵심 원천기술 개발을 위한 공동연구 환경조성과 연구 장비 공동 활용을 위한 IT융합특화 연구센터(Research Center) 구축 나. 연구수행 범위 - 모듈실험실 시설보완 기존장비 개선 - 신규장비 도입 및 설치 - 연구장비 공동활용 - 핵심.원천기술 개발 및 IP DB 구축 - IT 융합기술 관련 워크샵 및 기술교류회 나. 연구의 내용 - 모듈실험실 시설보완 및 기존장비 개선 $cdot$ IT-BT 및 IT융합 모듈실험실 시설개선 $cdot$ 기존장비 개선 - 신규장비 도입 및 설치 $cdot$ 수평형 확산로 $cdot$ 웨이퍼 세정장치 $cdot$ 다중 박막증착기 $cdot$ 고농도 이온주입기 $cdot$ 감광막 도포 및 현상기 - 연구장비 공동활용 $cdot$ 융합 공동시험 환경조성을 통한 연구장비 공동활용 - 핵심.원천기술 개발 및 IP DB 구축 $cdot$ 핵심 원천기술 개발 및 IT DB화 - IT 융합기술 관련 워크샵 및 기술교류회
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