05ZB1100, The Service Project of Semiconductor Foundry,
Kim Bo Woo
Abstract
A. 반도체 소자 및 공정기술 개발 $ullet$ 고에너지 입자위치 추적용 양면 실리콘 $mu$-strip제작 $ullet$ PIN형 반도체 검출기용 실리콘 다이오드 $ullet$ 감광막 처리 공정기술 개선 $ullet$ 기 개발된 소자의 소량생산 지원 B. 반도체 시설 운영기술 개발 $ullet$ 실리콘 및 화합물 반도체 실험실 운영 $ullet$ 반도체 연구장비 유지 보수 $ullet$ 반도체 유틸리티 시설 운영 $ullet$ 반도체 유틸리티 시설 유지 및 보수 $ullet$ 환경 관리
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