03ZB1100, The Service Project of Semiconductor Foundry,
Kim Bo Woo
Abstract
A. 반도체 소자 및 공정기술 개발 - 입자 감지용 실리콘 PIN diode 제작 기술 개발 - 적외선 감지용 실리콘 photodiode 제작 기술 개발 - Solid state relay용 BCD 소자의 제작 - 고속 SiGe HBT 소자의 제작 - 0.8 ${mu}$m CMOS ASIC수율 향상 - Trench DMOS, trench IGBT, LDMOS 등의 전력소자 제작 - 실리콘 JFET 소자를 이용한 RF IC 제작 B. 반도체 시설 운영 기술 개발 - 실리콘 및 화합물 반도체 실험실 운영 - 반도체 연구장비 유지 보수 - 반도체 유틸리티 시설 운영 - 반도체 유틸리티 시설 유지 및 보수 - 환경 관리 - 원부 자재 재고관리
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