ETRI-Knowledge Sharing Plaform

KOREAN
연구보고서 검색
Type Funding Org. Research Org.
Year ~ Keyword

Detail

반도체 Foundry 운영 사업 (5차년도)
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Participants
Koo Jin-Gun, Bae Yoon Kyu, Park Kun Sik, Yoon Yong Sun, Park Jong-Moon, Shin Dong Suk, Yoo Seong Wook, Kim Sang Gi, Lim Byung Won, Kim Bo Woo, Park Byung Mu, Kim Gyu Yeol, Lee Byoung Taeg
Published
200412
Type
Annual Report
Keyword
유틸리티 시설, PIN Doide, COMS, 플라즈마
Funding Org.
한국전자통신연구원
Research Org.
한국전자통신연구원
Project Code
04ZB1100, The Service Project of Semiconductor Foundry, Kim Bo Woo