나노 소자용, CMP 장비, PECVD, I-line 스테퍼, 실리콘 나노, Healthcare, Plasma Enhanced Chemical Vapor Deposition, Chemical Mechanical Polishing
KSP Keywords
Fusion technology, Set up
Funding Org.
지식경제부
Research Org.
한국전자통신연구원
Project Code
08MB1300, Set-up of Research Infra for IT Fusion Technology,
Jin-Yeong Kang
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