Subject

Subjects : oxidation process

  • Articles (6)
  • Patents (1)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2017 Oxidation Mechanism of Si1_xGex Nanowires with Au Catalyst Tip as a Function of Ge Content   배정민  ACS Applied Materials & Interfaces, v.9, no.42, pp.37411-37418 0 원문
Journal 2017 A Study on N2O Direct Oxidation Process with Re-oxidation Annealing for the Improvement of Interface Properties in 4H-SiC MOS Capacitor   Doohyung Cho  Journal of the Korean Physical Society, v.71, no.3, pp.150-155 5 원문
Journal 2015 Structural Evolution and Carrier Scattering of Si Nanowires as a Function of Oxidation Time   배정민  Journal of Materials Chemistry C : Materials for Optical and Electronic Devices, v.3, no.9, pp.2123-2131 6 원문
Journal 2011 Conformal Deposition of an Insulator Layer and Ag Nano Paste Filling of a through Silicon Via for a 3D Interconnection   Baek Kyu-Ha  Journal of the Korean Physical Society, v.59, no.3, pp.2252-2258 10 원문
Journal 2008 Growth of thin Si oxide in a cyclic oxygen plasma environment below 200°C   Jaehyun Moon  Applied Surface Science, v.254, no.20, pp.6422-6427 8 원문
Journal 2008 New fabrication of a strained Si/Si1−yGey dual channel on a relaxed Si1−xGex virtual substrate using a Ge-rich layer formed by oxidation   Kim Sang Hoon  Applied Surface Science, v.254, no.19, pp.6025-6029 1 원문
특허 검색결과
Status Year Patent Name Country Family Pat. KIPRIS
Registered 2010 MICRO PIEZORESISTIVE PRESSURE SENSOR AND MANUFACTURING METHOD THEREOF UNITED STATES
연구보고서 검색결과
Type Year Research Project Primary Investigator Download
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