Subject

Subjects : Low deposition temperature

  • Articles (4)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2024 Wide process temperature of atomic layer deposition for In2 O3 thin-film transistors using novel indium precursor (N,N′-di-tert butylacetimidamido)dimethyllindium   Juhun Lee  Nanotechnology, v.35, no.37, pp.1-9 1 원문
Journal 2013 High Roughness Ag Back Reflector on a Metal Underlayer for Thin Film Solar Cell Applications   Lee Yoo Jeong  Materials Research Bulletin, v.48, no.12, pp.5093-5098 3 원문
Journal 2009 Low Temperature Grown Polycrystalline La0.7Sr0.3MnO3 thin Films on Amorphous SiO2 Substrates by Rf Magnetron Sputtering   최선규  Journal of Vacuum Science and Technology A, v.27, no.4, pp.595-600 3 원문
Journal 2008 Thin-film Passivation by Atomic Layer Deposition for Organic Field-effect Transistors   전하영  Applied Physics Letters, v.93, no.16, pp.1-3 32 원문
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