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Conference
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2017 |
MEMS Capacitive Microphone with Dual-Anchored Membrane
Chang Han Je Eurosensors 2017, pp.1-5 |
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원문
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Journal
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2015 |
A Concave-Patterned TiN/PECVD-Si3N4 /TiN Diaphragm MEMS Acoustic Sensor Based on a Polyimide Sacrificial Layer
Jaewoo Lee Journal of Micromechanics and Microengineering, v.25, no.12, pp.1-13 |
8 |
원문
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Conference
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2015 |
Open-Circuit Sensitivity Model based on Empirical Parameters for a Capacitive-type MEMS Acoustic Sensor
Jaewoo Lee International Conference on Materials and Applications for Sensors and Transducers (IC-MAST) 2015, pp.1-10 |
2 |
원문
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Conference
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2013 |
A Surface Micromachined MEMS Capacitive Microphone with Back-Plate Supporting Pillars
Chang Han Je SENSORS 2013, pp.1-4 |
6 |
원문
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Conference
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2011 |
A Surface-Micromachined MEMS Acoustic Sensor with Back-Plate Anchors of 100 μm Depth
Jaewoo Lee SENSORS 2011, pp.1-4 |
6 |
원문
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Conference
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2002 |
Design of electrostatic actuators for MOEMS applications
Dooyoung Hah Design, Test, Integration, and Packaging of MEMS/MOEMS 2002 (SPIE 4755), pp.200-207 |
25 |
원문
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