Subject

Subjects : Dry etch

  • Articles (4)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2019 Origin of the Dry Etch Damage in the Short-channel Oxide Thin-film Transistors for High Resolution Display Application   Ji Hun Choi  Thin Solid Films, v.674, pp.71-75 7 원문
Journal 2017 Analysis of Electrical Characteristics of AlGaN/GaN on Si Large SBD by Changing Structure   Lee Hyun Soo  Journal of Semiconductor Technology and Science, v.17, no.3, pp.354-362 1 원문
Journal 2015 0.34 VT AlGaN/GaN-on-Si Large Schottky Barrier Diode With Recessed Dual Anode Metal   Lee Hyun Soo  IEEE Electron Device Letters, v.36, no.11, pp.1132-1134 53 원문
Journal 2003 Attenuation characteristics of InP/InGaAsP deep‐ridge waveguide turning mirror   Jeong Woo Park  Microwave and Optical Technology Letters, v.37, no.6, pp.428-431 1 원문
특허 검색결과
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연구보고서 검색결과
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