Subjects :
Liquid precursor
논문 검색결과
| Type |
Year |
Title |
Cited |
Download |
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Journal
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2021 |
Optimizing Oxide Mixing Ratio for Achieving Energy‐Efficient Oxide Thin‐Film Transistors
Jaehyun Moon Physica Status Solidi (A) - Applications and Materials Science, v.218, no.16, pp.1-5 |
1 |
원문
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Journal
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2019 |
All-oxide Thin-film Transistors with Channels of Mixed InOx-ZnOy Formed by Plasma-enhanced Atomic Layer Deposition Process
Lee Jeongmu Journal of Vacuum Science and Technology A, v.37, no.6, pp.1-7 |
12 |
원문
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Journal
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2018 |
원자층 증착법을 이용한 고이동도 초박막 결정질 인듐 옥사이드 박막 트랜지스터
Lee Jongchan Applied Physics Letters, v.113, no.11, pp.1-5 |
61 |
원문
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Conference
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2017 |
Indium Oxide Thin Films Grown by PEALD using Triethylindium Liquid Precursor and O2 Plasma for TFTs
Jeho Na International Forum on Functional Materials (IFFM) 2017, pp.253-253 |
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특허 검색결과
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Year |
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Family Pat. |
KIPRIS |
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연구보고서 검색결과
| Type |
Year |
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