02ZM1100, The Service Project of Semiconductor Foundry,
Kim Bo Woo
Abstract
A. 반도체 소자 및 공정기술 분야 ● 0.5 ㎛ 소자 기술 개발 ● 1.0/0.8 ㎛ ASIC 수율 향상 ● 사진전사 공정 기술 개발 ● 소자분리막 공정기술 개발 ● Contact 형성 공정기술 개발 ● Via 형성 공정기술 개발 ● 화합물반도체 MMIC 공정기술 개선 B. 반도체 시설 운영 기술 개발 ● 실리콘 및 화합물 반도체 실험실 운영 ● 반도체 연구장비 유지 보수 ● 반도체 유틸리티 시설 운영 ● 반도체 유틸리티 시설 유지 및 보수 ● 환경 관리 ● 원.부 자재 재고관리
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