Subject

Subjects : ICP etching

  • Articles (5)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2015 DC and RF Characteristics of AlGaN/GaN HEMTs on SiC with Gate Recessed by Using ICP Etching of BCl3/Cl2   Hyung Sup Yoon  Journal of the Korean Physical Society, v.67, no.4, pp.654-657 3 원문
Conference 2014 DC and RF Characteristics of AlGaN/GaN HEMTs on SiC with Recessed Gate by ICP Etching of BCl3/SF6   Hyung Sup Yoon  International Symposium on the Physics of Semiconductors and Applications (ISPSA) 2014, pp.81-81
Conference 2009 Identifying Resonance Frequency Deviations for High Order Nano-Wire Ring Resonator Filters based on a Coupling Strength Variation   Park Sahnggi  Silicon Photonics IV (SPIE 7220), v.7220, pp.1-12 0 원문
Conference 2008 Sensitivity Tunable Capacitive Type Micro Accelerometer   Chang Han Je  SENSORS 2008, pp.1020-1023 4 원문
Conference 2007 Sensing gap reconfigurable capacitive type MEMS accelerometer   Chang Han Je  Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV (SPIE 6800), v.6800, pp.1-7 5 원문
특허 검색결과
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연구보고서 검색결과
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