Subject

Subjects : Deep reactive ion etching

  • Articles (7)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2013 Micromachined stress-free TSV hole for AlGaN/GaN-on-Si (1 1 1) platform-based devices   Sang Choon Ko  Journal of Micromechanics and Microengineering, v.23, no.3, pp.1-7 3 원문
Journal 2011 High-Resolution Capacitive Microinclinometer With Oblique Comb Electrodes Using (110) Silicon   정대훈  IEEE Journal of Microelectromechanical Systems, v.20, no.6, pp.1269-1276 12 원문
Journal 2011 Dual Etch Processes of Via and Metal Paste Filling for Through Silicon Via Process   함용현  Thin Solid Films, v.519, no.20, pp.6727-6731 26 원문
Journal 2009 Fabrication of morphological defect-free vertical electrodes using a (1 1 0) silicon-on-patterned-insulator process for micromachined capacitive inclinometers   윤성식  Journal of Micromechanics and Microengineering, v.19, no.3, pp.1-7 21 원문
Conference 2009 Novel Micro Capacitive Inclinometer with Oblique Comb Electrode and Suspension Spring Aligned Parallel to {111} Vertical Planes of (110) Silicon   정대훈  International Conference on Micro Electro Mechanical Systems (MEMS) 2009, pp.797-800 4 원문
Conference 2008 Capacitive Micro Inclinometer with Scalloping-Free and Footing-Free Vertical Electrodes using Crystalline Etching of (110) Silicon   윤성식  SENSORS 2008, pp.662-665 0 원문
Journal 2004 Fabrication and characterization of a bidirectional valveless peristaltic micropump and its application to a flow-type immunoanalysis   Dae-Sik Lee  Sensors and Actuators B : Chemical, v.103, no.1-2, pp.409-415 29 원문
특허 검색결과
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연구보고서 검색결과
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