Subject

Subjects : Rf sputtering

  • Articles (6)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2018 Deposition Pressure Dependent Electric Properties of (Hf, Zr)O2 Thin Films Made by RF Sputtering Deposition Method   Moon Seungeon  Journal of the Korean Physical Society, v.73, no.11, pp.1712-1715 0 원문
Conference 2017 Investigation of Compositional Variation across Zn(O,S) Thin Films prepared by RF Sputtering for Photovoltaic Applications   Cho Daehyung  한국태양광발전학회 학술 대회 (추계) 2017, pp.1-1
Journal 2013 Effect of Silicide/Silicon Hetero-Junction Structure on Thermal Conductivity and Seebeck Coefficient   Choi Won Chul  Journal of Nanoscience and Nanotechnology, v.13, no.12, pp.7801-7805 6 원문
Journal 2011 Effects of the Composition of Sputtering Target on the Stability of InGaZnO Thin Film Transistor   허준영  Thin Solid Films, v.519, no.20, pp.6868-6871 38 원문
Journal 2009 High performance thin film transistor with cosputtered amorphous Zn–In–Sn–O channel: Combinatorial approach   Ryu Min Ki  Applied Physics Letters, v.95, no.7, pp.072104-1-072104-3 119 원문
Journal 2002 Electrochemical Properties of Vanadium Oxide Thin Film Deposited by R.F. Sputtering   Park Yong-Joon  Solid State Ionics, v.154-155, pp.229-235 38 원문
특허 검색결과
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