Subject

Subjects : CF 4

  • Articles (5)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2018 DC and RF Characteristics of Enhancement-Mode Al2O3/AlGaN/GaN MIS-HEMTs Fabricated by Shallow Recess Combined with Fluorine-Treatment and Deep Recess   Jung Hyunwook  ECS Journal of Solid State Science and Technology, v.7, no.4, pp.197-200 3 원문
Journal 2012 Nano-Scale Texturing of Borosilicate Glasses Using CF4-Based Plasma Discharge for Application in Thin film Solar Cells   김형수  Journal of Nanoscience and Nanotechnology, v.12, no.4, pp.3464-3468 4 원문
Journal 2011 Analysis of Etching Mechanism and Etched Slope Control of Silicon for Nanoimprinting Lithography   함용현  Journal of Nanoscience and Nanotechnology, v.11, no.7, pp.6523-6527 0 원문
Conference 2009 Study on the Surface Characteristics of Parylene-C Films in Inductively Coupled O2/CF4 Gas Plasma   Ham Yong-Hyun  International Meeting on Information Display (IMID) 2009, pp.1399-1401
Journal 2006 Dry Etching of Ge2Sb2Te5 Thin Films into Nanosized Patterns Using TiN Hard Mask   Yoon Sung Min  Japanese Journal of Applied Physics, v.45, no.40, pp.1080-1083 21 원문
특허 검색결과
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연구보고서 검색결과
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