Subject

Subjects : Etching technique

  • Articles (6)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2016 Effect of Fluoride-based Plasma Treatment on the Performance of AlGaN/GaN MISFET   Hokyun Ahn  ETRI Journal, v.38, no.4, pp.675-684 5 원문
Journal 2012 Electrowetting Lens Employing Hemispherical Cavity Formed by Hydrofluoric Acid, Nitric Acid, and Acetic Acid Etching of Silicon   이준규  Japanese Journal of Applied Physics, v.51, no.6 PART 2, pp.1-7 13 원문
Journal 2010 Optimum Condition of Anisotropic Plasma Etching for Improving Bending Properties of Ionic Polymer-Metal Composites   Choi Nak Jin  Journal of Nanoscience and Nanotechnology, v.10, no.5, pp.3299-3303 9 원문
Journal 2008 Fabrication and Electrical Characterization of Phase-change Memory Devices with Nanoscale Self-heating-channel Structures   Yoon Sung Min  Microelectronic Engineering, v.85, no.12, pp.2334-2337 12 원문
Conference 2007 Novel Process for the Electrodes of Microbolometer   Ryu Hojun  International Conference on Sensor Technologies and Applications (SENSORCOMM) 2007, pp.10-13 1 원문
Journal 2004 A Two-Step Etching Technique for Silica Terraces in the PLC Hybrid Integration   Han Young-Tak  Photonics Technology Letters, v.16, no.11, pp.2436-2438 12 원문
특허 검색결과
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