18ZB1700, Development of GaN Nanowire-based NO2 Gas Sensor Device,
Hokyun Ahn
Abstract
<연구내용 및 범위> 1. GaN 나노구조물 공정 개발 - GaN 나노구조물 설계 및 패터닝 공정 개발 - GaN 나노구조물 제작용 건식식각 공정 개발 - GaN 나노구조물 제작용 TMAH 후처리 공정 개발
2. Planar-type GaN 센서 소자 개발 - Planar-type GaN 센서 소자 설계 - Planar-type GaN 센서 소자 단위공정 개발 - Planar-type GaN 센서 소자 공정 - Planar-type GaN 센서 소자 성능 분석
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