02MB2800, Development of 0.25㎛ E/D Library,
Hae Cheon Kim
Abstract
(1) 연구개발 최종 목표 가. 4인치 GaAs 웨이퍼를 이용한 0.25um E/D MESFET Library 확립 - GaAs E/D/G MESFET 개발 - 스위치 FET 개발 - 디지털용 smallFET 개발 - Schottky Diode 소자 개발 - R/L/C 공정 확립 - 설계지침서 작성 나. 라이브러리를 이용한 MMIC 설계 및 제작 - 2.5 Gbps 광통신용 TIAMMIC 개발 - SPDT 스위치 MMIC 개발 (2) 연구 수행 내용 가. 4인치 웨이퍼를 이용한 GaAs MMIC 공정 언구 나. 소자별 설계변수 추출 다. 소자별 신뢰성 연구 라. 공정균일도 향상 마. 라이브러리를 이용한 MMIC 설계 및 제작
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