Subject

Subjects : Etching rate

  • Articles (8)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2020 Effects of Recess Depth Under the Gate Area on the V th-Shift for Fabricating Normally-Off Field Effect Transistors on AlGaN/GaN Heterostructures   Kim Zin-Sig  Journal of Nanoscience and Nanotechnology, v.20, no.7, pp.4170-4175 원문
Journal 2020 A Study on the Behavior of Gate Recess Etch by Photoresist Openings on Ohmic Electrode in InAlAs/InGaAs mHEMT Devices   Min Byoung-Gue  Journal of the Korean Physical Society, v.77, no.2, pp.122-126 4 원문
Conference 2019 Normally-off Field Effect Transistors using fine controlled Recess under Gate Area on AlGaN/GaN Heterostructures   Kim Zin-Sig  대한전자공학회 학술 대회 (추계) 2019, pp.215-218
Journal 2018 Ultra-low Rate Dry Etching Conditions for Fabricating Normally-off Field Effect Transistors on AlGaN/GaN Heterostructures   Kim Zin-Sig  Solid-State Electronics, v.140, pp.12-17 9 원문
Journal 2015 Preparation and Characterization of a Triple Layered Au-PMMA-PbSe Hybrid Nanocomposite: Manipulation of PMMA Spacer Layer by Oxygen Plasma Etching   Kim Wan Joong  Bulletin of the Korean Chemical Society, v.36, no.8, pp.1966-1973 2 원문
Journal 2012 Etching Characteristics and Mechanisms of TiO2 Thin Films in HBr/Cl 2/Ar Inductively Coupled Plasma   김대희  Japanese Journal of Applied Physics, v.51, no.10, pp.1-5 3 원문
Journal 2012 Etching Characteristics and Mechanisms of TiO2 Thin Films in HBr/Ar and Cl2/Ar Inductively-Coupled Plasmas   장한별  Plasma Chemistry and Plasma Processing, v.32, no.2, pp.333-342 3 원문
Journal 2010 Etching Characteristics and Mechanism of ZnO and Ga-Doped ZnO Thin Films in Inductively Coupled HBr/Ar/CHF3 Plasma   함용현  Japanese Journal of Applied Physics, v.49, no.8 PART 2, pp.1-5 5 원문
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