Subjects :
Etch Selectivity
논문 검색결과
| Type |
Year |
Title |
Cited |
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Conference
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2017 |
Via-holes Etching on SiC Substrate Characterized by High Etch Selectivity with GaN Epilayer
Min Byoung-Gue 한국전기전자재료학회 학술 대회 (하계) 2017, pp.1-1 |
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Journal
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2015 |
Highly Stable, High Mobility Al:SnZnInO Back-Channel Etch Thin-Film Transistor Fabricated Using PAN-Based Wet Etchant for Source and Drain Patterning
Cho Sung Haeng IEEE Transactions on Electron Devices, v.62, no.11, pp.3653-3657 |
38 |
원문
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Journal
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2013 |
Dry Etching Characteristics of Indium Zinc Oxide Thin Films in Adaptive Coupled Plasma
Woo Jong Chang Transactions on Electrical and Electronic Materials, v.14, no.4, pp.216-220 |
1 |
원문
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Journal
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2009 |
Etching Characteristics of VO2 Thin Films Using Inductively Coupled Cl2/Ar Plasma
한용현 Japanese Journal of Applied Physics, v.48, no.8, pp.08HD041-08HD045 |
8 |
원문
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Journal
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2008 |
Model-Based Analysis of the ZrO2 Etching Mechanism in Inductively Coupled BCl3/Ar and BCl3/CHF3/Ar Plasmas
김만수 ETRI Journal, v.30, no.3, pp.383-393 |
10 |
원문
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Journal
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2008 |
Etching Characteristics of Al2O3 Thin Films in Inductively Coupled BCl3/Ar Plasma
Sun Jin Yun Vacuum, v.82, no.11, pp.1198-1202 |
14 |
원문
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Journal
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2002 |
Active-Matrix Field Emission Display with Amorphous Silicon Thin-Film Transistors and Mo-Tip Field Emitter Arrays
Yoon-Ho Song ETRI Journal, v.24, no.4, pp.290-298 |
26 |
원문
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Journal
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2002 |
액티브-매트릭스 캐소드를 위한 비정질 실리콘 박막 트랜지스터와 Mo-팁의 집적화 및 특성 분석
Kim Do-Hyung IEEE Transactions on Electron Devices, v.49, no.7, pp.1136-1142 |
3 |
원문
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Journal
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2002 |
Characterization of Via Etching in CHF3/CF4 Magnetically Enhanced Reactive Ion Etching Using Neural Networks
Kwon Sung-Ku ETRI Journal, v.24, no.3, pp.211-220 |
10 |
원문
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