Subject

Subjects : Auger electron

  • Articles (10)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2015 CCQM pilot study CCQM-P140: quantitative surface analysis of multi-element alloy films   김경중  Metrologia, v.52, no.Technical Suppl., pp.1-28 원문
Journal 2014 The Fabrication of an Applicative Device for Trench Width and Depth Using Inductively Coupled Plasma and the Bulk Silicon Etching Process   Woo Jong Chang  Transactions on Electrical and Electronic Materials, v.15, no.1, pp.49-54 1 원문
Journal 2013 Accurate Quantification of Cu(In,Ga)Se2 Films by AES Depth Profiling Analysis   장종식  Applied Surface Science, v.282, pp.777-781 8 원문
Journal 2011 Dry Etching of TiN in N2/Cl2/Ar Adaptively Coupled Plasma   Kim Dong -Pyo  Vacuum, v.86, no.4, pp.380-385 5 원문
Journal 2010 Effects of N2 and NH3 Remote Plasma Nitridation on the Structural and Electrical Characteristics of the HfO2 Gate Dielectrics   Park Kun Sik  Applied Surface Science, v.257, no.4, pp.1347-1350 37 원문
Journal 2008 Patterning of Conducting Polymers Using Charged Self-Assembled Monolayers   Jeong Mihee  Langmuir, v.24, no.17, pp.9825-9831 25 원문
Journal 2008 Effects of Oxygen Concentration on the Electrical Properties of ZnO Films   김홍승  Ceramics International, v.34, no.4, pp.1097-1101 30 원문
Journal 2007 Electrical and microstructural properties of low‐resistance Ti/Re/Au ohmic contacts to n‐type GaN   V. Rajagopal Reddy  Physica Status Solidi (A), v.204, no.10, pp.3392-3397 0 원문
Conference 2002 The Effects of Plasma Induced Damage on The Channel Layers of Ion Implanted GaAs MESFETs during Reactive Ion Etching(RIE) and Plasma Ashing Processes   Hokyun Ahn  Materials Research Society (MRS) Meeting 2002 (Spring), v.720, pp.67-72 1 원문
Conference 2001 Effects of O/sub 2//C/sub 2/F/sub 6/ plasma descum with RF cleaning on via formation in MCM-D substrate using photosensitive BCB   Ju Chull Won  Electronic Components and Technology Conference (ECTC) 2001, pp.1-3 원문
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