17ZB1500, Developement of key material and device technologies for next generation semiconductor devices with extreme performance,
Leem Young Ahn
Abstract
<연구내용 및 범위> - 테라급 통신망을 위한 반도체기반 광빗살발생기 구현 . 펄스 레이저 다이오드 개발 . 좁은 선폭을 가지는 광원 개발 . 광빗살발생기 구현 및 집적구도 연구
- GaN-Diamond Template 기술 및 소자기술 연구 . GaN/Diamond interlayer 다변화에 따른 Diamond 성장기술 개발 . GaN-Diamond 웨이퍼 레벨 증착 시험 및 특성 평가 . 10A급 GaN-Diamond SBD 소자개발 . GaN-Diamond 소자 다이싱/패키징, DC 및 열 특성 평가
- 고이동도의 p형 산화물반도체 소재기술 . 진공형 p형 산화물반도체 소재성막기술 개발 . 비진공계 p형 산화물반도체 소재성막기술 개발 . TFT 채널용 p형 산화물반도체 성막 및 최적화 기술 개발 . 고성능 산화물반도체 소재의 결함 특성의 이론적 분석
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