Subject

Subjects : Etch-stop

  • Articles (8)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2020 Effects of Recess Depth Under the Gate Area on the V th-Shift for Fabricating Normally-Off Field Effect Transistors on AlGaN/GaN Heterostructures   Kim Zin-Sig  Journal of Nanoscience and Nanotechnology, v.20, no.7, pp.4170-4175 원문
Journal 2018 Ultra-low Rate Dry Etching Conditions for Fabricating Normally-off Field Effect Transistors on AlGaN/GaN Heterostructures   Kim Zin-Sig  Solid-State Electronics, v.140, pp.12-17 9 원문
Conference 2017 P‐10: High‐Density Plasma Sputtered InZnSnO Thin‐Film Transistors Fabricated by Back Channel Etching Method on Flexible Polyimide Substrate   Cho Sung Haeng  Society for Information Display (SID) International Symposium 2017, pp.1262-1264 6 원문
Journal 2015 Highly Stable, High Mobility Al:SnZnInO Back-Channel Etch Thin-Film Transistor Fabricated Using PAN-Based Wet Etchant for Source and Drain Patterning   Cho Sung Haeng  IEEE Transactions on Electron Devices, v.62, no.11, pp.3653-3657 38 원문
Conference 2015 The Highly Stable InGaZnO TFTs Deposited by High Density Plasma Sputtering   Cho Sung Haeng  International Thin-Film Transistor Conference (ITC) 2015, pp.17-18
Journal 2013 Bilayered Etch-Stop Layer of Al2O3/SiO2 for High-Mobility In-Ga-Zn-O Thin-Film Transistors   Park Sang-Hee  Japanese Journal of Applied Physics, v.52, no.10 PART1, pp.1-3 6 원문
Conference 2013 High Mobility Oxide TFT for Large Area High Resolution AMOLED   Park Sang-Hee  Society for Information Display (SID) International Symposium 2013, pp.18-21 10 원문
Journal 2002 An Etch-Stop Technique Using Cr2O3 Thin Film and Its Application to Silica PLC Platform Fabrication   Shin Jang Uk  ETRI Journal, v.24, no.5, pp.398-400 8 원문
특허 검색결과
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