Subject

Subjects : plasma oxidation

  • Articles (7)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2012 High Performance of Ultralow Temperature Polycrystalline Silicon Thin Film Transistor on Plastic Substrate   박동진  Solid-State Electronics, v.75, pp.97-101 2 원문
Journal 2010 Fabrication of Self-Aligned TFTs with a Ultra-Low Temperature Polycrystalline Silicon Process on Metal Foils   Jaehyun Moon  Solid-State Electronics, v.54, no.11, pp.1326-1331 2 원문
Journal 2008 Growth of thin Si oxide in a cyclic oxygen plasma environment below 200°C   Jaehyun Moon  Applied Surface Science, v.254, no.20, pp.6422-6427 8 원문
Journal 2006 Performance Improvement of Ultralow Temperature Polycrystalline Silicon TFT on Plastic Substrate by Plasma Oxidation of Polycrystalline Si Surface   Kim Yong Hae  IEEE Electron Device Letters, v.27, no.11, pp.896-898 10 원문
Conference 2006 Plasma Oxidation Effect on Ultralow Temperature Polycrystalline Silicon TFT on Plastic Substrate   Kim Yong Hae  International Meeting on Information Display 2006, pp.1122-1125
Conference 2006 Self-Aligned Thin Film Transistor Fabrication with an Ultra Low Temperature Polycrystalline Silicon Process on a Benzocyclobutene Planarized Stainless Steel Foil Substrate   Jaehyun Moon  Materials Research Society (MRS) Meeting 2006 (Spring), pp.1-6
Journal 2004 고성능 저온 폴리실리콘 소자 특성   Kim Yong Hae  IEEE Electron Device Letters, v.25, no.8, pp.550-552 27 원문
특허 검색결과
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